NexWafe process production facility

Technology / Process

Ultra-high efficiency from EpiNex®

From Gas to Wafer. A Smarter Manufacturing Process.

Five steps transform silicon feedstock into precision-engineered wafers, eliminating conventional ingot growth and wire sawing.

NexWafe seed preparation equipment

Step 1

Seed Preparation

The first step in our patented process is creation of a precisely engineered silicon release layer on the seed wafer substrate with scalability to mass production.

NexWafe in-line CVD deposition equipment, photograph rotated 90 degrees

Step 2

Epitaxial Growth

The heart of the EpiNex® process is the high throughput in-line CVD direct ‘gas to wafer’ deposition process. This enables >40% less energy consumption than conventional CZ and wafering and significantly less waste.

EpiNex wafer detachment from the reusable seed wafer

Step 3

Wafer Detachment

The EpiNex® wafer is detached from the seed wafer substrate and the seed wafer recycled for continued use.

NexWafe wafer finishing equipment

Step 4

Wafer Finishing

The EpiNex® wafer undergoes a final post treatment and is ready for packaging.

Finished square EpiNex silicon wafer

Step 5

Finished EpiNex® Wafer

The finished wafer offers the highest level of quality and repeatability and is a drop in replacement for conventional CZ wafers.

The NexWafe way

EpiNex® technology reduces waste in wafer manufacturing by almost 50%

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